The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 1994
Filed:
Mar. 05, 1993
Applicant:
Inventor:
Hiroshi Kajimura, Tokyo, JP;
Assignee:
Olympus Optical Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
250561 ; 250306 ;
Abstract
A cantilever displacement detection apparatus comprises a laser diode for emitting a laser beam functioning as detection beam for displacement detection based on an optical lever method, and a position sensor having two light receiving regions for outputting signals corresponding to the intensity of received light. The laser diode and the position sensor are arranged such that the light beam is passed through an objective lens and made incident slantingly on a mirror provided on a free-end portion of a cantilever and the laser beam reflected by the mirror is passed through the objective lens and made incident on the position sensor.