The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 1994
Filed:
Nov. 02, 1992
Applicant:
Inventors:
Wayne T McDermott, Allentown, PA (US);
Richard C Ockovic, Northampton, PA (US);
Jin J Wu, Ossining, NY (US);
Douglas W Cooper, Milwood, NY (US);
Alexander Schwarz, Bethlehem, PA (US);
Henry L Wolfe, Pleasant Valley, NY (US);
Assignees:
Air Products and Chemicals, Inc., Allentown, PA (US);
International Business Machines Corporation, Hopewell Junction, NY (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B / ;
U.S. Cl.
CPC ...
134-7 ;
Abstract
A method is disclosed for cleaning microelectronic surfaces using an aerosol of at least substantially solid argon or nitrogen particles which impinge upon the surface to be cleaned and then evaporate and the resulting gas is removed by venting along with the contaminants dislodged by the cleaning method.