The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 22, 1994

Filed:

Apr. 23, 1992
Applicant:
Inventors:

Yoshiyuki Mimura, Tokyo, JP;

Hiroshi Kajimura, Tokyo, JP;

Toshihito Kouchi, Tokyo, JP;

Akitoshi Toda, Tokyo, JP;

Yasuo Isono, Tokyo, JP;

Hiroko Ohta, Tokyo, JP;

Ryouhei Shimizu, Saitama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G11C / ; G01N / ;
U.S. Cl.
CPC ...
365151 ; 365174 ; 365233 ; 36523003 ; 365183 ; 369126 ; 250306 ; 250309 ; 257 30 ;
Abstract

A scanning tunneling microscope memory apparatus comprises first and second integrated circuit (IC) substrates. First and second cantilevers, which can be moved by piezoelectric elements, are arranged on the first and second IC substrates, respectively. Tunnel current probes are provided on a free end of the first cantilever, and a recording element is provided on a free end of the second cantilever. The first and second cantilevers are spaced from each other and overlap such that the tunnel current probes face the recording element. The first or second substrate includes a charge coupled device (CCD) circuit, a control circuit for controlling the CCD circuit and cantilevers, and a drive circuit having a preamplifier, a write circuit, and a servo circuit.


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