The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 08, 1994

Filed:

Apr. 28, 1992
Applicant:
Inventors:

Toru Imori, Toda, JP;

Takayuki Ninomiya, Toda, JP;

Kazuhiro Kondoh, Toda, JP;

Kouichi Nakamura, Toda, JP;

Kouhei Ushikubo, Toda, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C07F / ;
U.S. Cl.
CPC ...
568-8 ; 568 17 ;
Abstract

A high-purity organic phosphine is obtained by washing organic phosphine or an organic solvent solution thereof with water, an alkaline aqueous solution or an acidic aqueous solution, whereby impurities, particularly, silicon compounds, 2-methoxy ethanol, and organic halides, contained in organic phosphine can be removed, so that such high-purity organic phosphine may be used as a raw material for high-performance compound semiconductor thin film with Groups III and V elements of the Periodic Table.


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