The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 18, 1994

Filed:

Sep. 18, 1992
Applicant:
Inventors:

Randall J Vavra, Orange, CA (US);

Lam T Nguyen, Garden Grove, CA (US);

Erik Q Tran, Garden Grove, CA (US);

Assignee:

Unit Instruments, Inc., Orange, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F / ; G01F / ;
U.S. Cl.
CPC ...
732025 ;
Abstract

A vertical flow thermal mass flow sensor for a vertical flow thermal mass flow meter of a vertical flow thermal mass flow controller has a sensor tube having a gas inlet for receiving a gas to be metered. The sensor tube includes a first curved convection trap and a second curved convection trap for preventing convective flow of the gas through the sensor tube. A thermally responsive winding is wound about the sensor tube and is energized from a source of electrical energy. The resistance of the thermally responsive winding is responsive to the rate of flow of the gas through the sensor tube and provides an indication thereof.


Find Patent Forward Citations

Vavra, Randall. (1994). Thermal mass flow sensor (U.S. Patent No. 5279154). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5279154

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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