The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 11, 1994

Filed:

Feb. 12, 1993
Applicant:
Inventor:

Hiroshi Horie, Kawasaki, JP;

Assignee:

Fujitsu Limited, Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
437228 ; 437 67 ; 437 78 ; 437 90 ; 437109 ; 437182 ; 437243 ; 257510 ; 257520 ;
Abstract

A method for fabricating a semiconductor device comprises the steps of forming a depression on a substrate, bonding a plate of a single crystal semiconductor material on the substrate to establish a contact such that a closed space is formed in the substrate in correspondence to the depression, reducing the thickness of the plate, forming a penetrating opening through the plate in communication to the space to form a bridging part in the plate as a region left from the formation of the penetrating opening, forming an insulation film to cover at least a lower major surface and both side walls of the bridging part, filling the space by depositing polysilicon through the penetrating opening, providing a conductivity to the polysilicon that fills the space, removing the polysilicon that has been deposited on the upper surface of the bridging part to expose a crystal surface of the semiconductor material forming the plate, and forming an active device on the bridging part.


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