The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 1994
Filed:
Feb. 08, 1993
Applicant:
Inventor:
Robert F Rogler, Rehoboth, MA (US);
Assignee:
OCG Microelectronic Materials, Inc., West Paterson, NJ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C08G / ; G03C / ; B05D / ; B29D / ;
U.S. Cl.
CPC ...
528155 ; 528129 ; 528166 ; 430166 ; 430311 ; 430312 ; 430313 ; 430314 ; 430315 ; 428 357 ; 428460 ; 428620 ; 428623 ; 428626 ; 427 96 ; 427 97 ; 427240 ; 4273855 ;
Abstract
A method of planarizing topographical features on a substrate for subsequent coating of a radiation sensitive composition thereon comprising:
Quick Actions:
Rogler, Robert. (1994). Selected novolak resin planarization layer for lithographic applications (U.S. Patent No. 5276126). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5276126
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile