The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 1993
Filed:
Apr. 30, 1991
Yuuichi Abe, Hachioji, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A method of the probing test comprising the steps of detecting a first scribe line of chips in a wafer, calculating a first center line of said first scribe line on the basis of the resultant, detecting a second scribe line intersecting the first scribe line, calculating a second center line of said second scribe line on the basis of the resultant, calculating a crossing point of the first and second center lines, identifying a reference pad of a first chip at predetermined position by referring to the crossing point, positioning a reference probe, which has a predetermined positional relationship with the crossing point, at the reference pad on the first chip, moving the test object. Therefore, each of the pads is respectively contacted with each of the probes.