The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 1993
Filed:
Jul. 08, 1992
Applicant:
Inventors:
Yoshiki Sakuma, Kawasaki, JP;
Masashi Ozeki, Kawasaki, JP;
Nobuyuki Ohtuka, Kawasaki, JP;
Kunihiko Kodama, Takarazuka, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437133 ; 437108 ; 437110 ; 148D / ; 148D / ; 156613 ;
Abstract
A heterojunction between In-containing compound semiconductors in which the interface thereof is controlled at an atom level is provided by a process of atomic layer epitaxy (ALE) in which hydrogen gas is utilized as a carrier gas and as a purge gas for a separation of source gases. The time for which the purge gas is supplied can be utilized for controlling the ALE.
Sakuma, Yoshiki. (1993). Atomic layer epitaxy of compound semiconductor (U.S. Patent No. 5270247). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5270247
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile