The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 30, 1993

Filed:

Dec. 21, 1992
Applicant:
Inventor:

Toru Kasai, Tokyo, JP;

Assignee:

JEOL Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250310 ; 250397 ;
Abstract

An electron microscope capable of performing accurate x-ray analysis is provided. An objective lens having a bottom polepiece from which unwanted x-rays are not produced is attached to the electron microscope. An EDS (energy-dispersive x-ray spectrometer) detector is also attached to the electron microscope to make an x-ray analysis. A film consisting of a light element such as beryllium is coated on the top surface and the tapering portion of the bottom polepiece to prevent the electron beam transmitted through the sample or the secondary electrons and the scattered electrons emanating from the sample from colliding against the surface of the bottom polepiece; otherwise x-rays characteristic of Fe and Co would be generated.


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