The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 1993
Filed:
Aug. 24, 1992
Kenichi Azuma, Tenri, JP;
Akio Kawamura, Nara, JP;
Sharp Kabushiki Kaisha, Osaka, JP;
Abstract
A process for manufacturing a semiconductor device which comprises the following steps of (i) forming a first insulating film on the whole surface of a semiconductor substrate having thereon a thin conductive layer with an intervening gate insulating film, (ii) removing the first insulating film at a channel region to cause the thin conductive layer to be exposed, thereby forming an opening portion, (iii) implanting ions in the opening portion to form a channel region in the substrate, (iv) forming a gate electrode of a conductive material in the opening portion, (v) removing only the first insulating film with leaving the gate electrode as it is and then implanting ions by using the gate as a mask to form a low carrier density region in the substrate, (vi) layering a second insulating film on the substrate including the gate and then carrying out an anisotropic etching to build a sidewall of the gate electrode, and (vii) implanting ions by use of the gate electrode and its sidewall as a mask to form a high carrier density region on the substrate, whereby completing an insulating gate type of field effect transistor having a low carrier density region for mitigating field effect, the low carrier density region adjoining to source and drain regions of high carrier density.