The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 1993
Filed:
Dec. 22, 1992
Applicant:
Inventors:
David C Ahlgren, Wappingers Falls, NY (US);
Shao-Fu S Chu, Poughkeepsie, NY (US);
Mary J Saccamango, Patterson, NY (US);
David A Sunderland, Hopewell Junction, NY (US);
Tze-Chiang Chen, Yorktown Heights, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
437 31 ; 148D / ; 257515 ; 257517 ;
Abstract
An image reversal process for self-aligned implants in which a mask opening and plug in the opening are used to enable one implant in the mask opening, another self-aligned implant in the region surrounding the opening, and a self-aligned electrode to be formed in the opening.