The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 23, 1993

Filed:

Apr. 02, 1992
Applicant:
Inventors:

Toshikazu Honda, Tokyo, JP;

Mikio Naruse, Tokyo, JP;

Toshikatsu Kaneyama, Tokyo, JP;

Yu Ishibashi, Tokyo, JP;

Ikuya Nishimura, Hokkaido, JP;

Assignee:

Jeol Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
25044211 ; 250311 ;
Abstract

A specimen-driving apparatus used with an electron microscope. The apparatus can translate or tilt the specimen holder while preventing it from being damaged if a human operator performs any erroneous operation. The device has X, Y, Z translation directive devices, and a tilt directive device for permitting the operator to enter instructions for translating and tilting the specimen holder. A contact detector senses that the holder is in contact with the upper magnetic pole piece. A tilt condition decision portion determines whether the holder has tilted into the positive or negative domain. A Z domain decision portion determines whether the Z coordinate of the holder lies in the positive or negative domain. When the contact of the holder with the pole piece is detected, reverse movement of the holder along the Z-axis is inhibited. Also, reverse tilting movement of the holder is inhibited. When the holder comes out of contact with the pole piece, these reverse movements are permitted.


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