The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 1993
Filed:
Apr. 02, 1992
Applicant:
Inventors:
Kinya Ueno, Nirasaki, JP;
Hiroki Taniyama, Kofu, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
B08B / ; B08B / ; B08B / ;
U.S. Cl.
CPC ...
134 66 ; 1341041 ; 134902 ;
Abstract
A washing apparatus includes plural washing vessels each containing a solution for cleaning or washing wafers, a boat housed in each washing vessel to support the wafers and immersed together with the wafers in the chemical solution, and a carrier for carrying the wafers into and out of its corresponding washing vessel. The carrier has a fork for supporting the wafers and loading and unloading them to and from the boat. It further has nozzles for washing and drying the fork.