The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 1993
Filed:
Apr. 19, 1990
Takao Okada, Hachioji, JP;
Shuzo Mishima, Hachioji, JP;
Tsugiko Takase, Hachioji, JP;
Hirofumi Miyamoto, Hachioji, JP;
Hiroko Ohta, Hachioji, JP;
Yasushi Satoh, Hachioji, JP;
Yoshimitsu Enomoto, Tokyo, JP;
Toshiaki Matsuzawa, Hachioji, JP;
Yuzo Nakamura, Hachioji, JP;
Hiroshi Kajimura, Tokyo, JP;
Olympus Optical Co., Ltd., Tokyo, JP;
Abstract
An atomic force microscope comprises a probe having a sharply-pointed tip end. The probe is supported on the free end portion of a cantilever and is close to the surface of a specimen. When an interatomic force is produced, the cantilever is deformed, and the probe is displaced. The displacement of the probe is detected by an optical system. A light beam emitted from a light source is collimated by a lens, and reflected by a polarized beam-splitter, and also by a half-mirror. Then, the light beam passes through a quarter wavelength plate and an objective lens, such that the light is converged on the cantilever. The reflected light beam from the cantilever returns along the same optical path and passes through the splitter. The light beam is divided into two light beams at the splitter. These two light beams are reflected by respective prisms and are then incident on respective photodetectors. These photodetectors detect the displacement of the probe.