The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 1993
Filed:
Jun. 24, 1991
Takahiro Akamatsu, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An alignment system incudes a sensor device including a pair of a light emitting element and a light receiving element, for detecting an edge of a substrate without contact thereto; a driving device for supporting the substrate and for moving the substrate; and a control device for controlling the driving device so as to position the substrate, wherein the control device controls the driving device so that the sensor device produces an output of a level which is within a predetermined tolerance range with respect to a set level, and wherein the control device is operable to renew the set level at a predetermined timing on the basis of (i) a first output of the sensor device corresponding to an output of the sensor device as produced in a first state in which light from the light emitting element of the sensor device is received by the light receiving element of the sensor device without being blocked and (ii) a second output of the sensor device corresponding to an output of the sensor device as produced in a second state in which the light reception of the light receiving element is completely blocked.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile