The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 1993
Filed:
Feb. 07, 1992
Akira Okuda, Sakai, JP;
Yoshikazu Yoshida, Izumi, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
An evaporation apparatus includes a vacuum chamber, a vacuum pump for producing a pressure-reduced atmosphere in the vacuum chamber, at least one vacuum evaporation device for evaporating an evaporation material provided in the vacuum chamber, a drum opposed to the vacuum evaporation device and rotating, for cooling a film substrate on which the evaporation material is to be deposited, a supply roller for supplying the film substrate to the drum, a winding roller for winding the film substrate on which the evaporation material has been deposited, a free roller for assisting the winding and travel of the film substrate, a voltage applying device for applying a DC voltage to the film substrate on which the evaporation material has been deposited; and an electric current measuring device for measuring an intensity of electric current flowing between the film substrate on which the evaporation material has been deposited and the ground.