The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 1993
Filed:
Nov. 22, 1991
Applicant:
Inventors:
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G21K / ;
U.S. Cl.
CPC ...
2504922 ; 25044011 ; 25044211 ;
Abstract
An ion beam processing apparatus which processes specimens held by a specimen holder in a vacuum vessel by irradiating the specimen with an ion beam. The apparatus includes a raising/lowering device for raising and lowering the specimen holder. When replacing the processed specimen by an unprocessed specimen, the specimen holder is raised and lowered by the raising/lowering device to effect specimen replacement. Due to this arrangement, specimen replacement can be performed automatically without opening the vacuum vessel to atmospheric air thereby increasing productivity.