The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 1993
Filed:
Aug. 29, 1991
David A Wiemann, Mesa, AZ (US);
James E Jaskie, Scottsdale, AZ (US);
John Summers, Apache Junction, AZ (US);
Robert C Kane, Woodstock, IL (US);
Motorola, Inc., Schaumburg, IL (US);
Abstract
An enclosure providing an evacuated region about an array of microelectronic vacuum devices including a substrate, a first encapsulation member defining a cavity, a second encapsulation member defining a cavity and mating with the first encapsulation member so as to define an encapsulated region, a ledge formed in the first encapsulation member for supporting the substrate and defining a communicating passage between the cavities and a sealing agent disposed between the mating surfaces of the encapsulation members to effect a vacuum seal such that when the encapsulated region is evacuated it will be at the same vacuum levels throughout to eliminate differential pressure induced deformation of the substrate. The evacuated substrate enclosure further provides for assembly without an evacuated environment.