The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 1993
Filed:
Aug. 16, 1990
Applicant:
Inventors:
Thomas Bayer, Sindelfingen, DE;
Johann Greschner, Pliezhausen, DE;
Yves Martin, Briarcliff Manor, NY (US);
Helga Weiss, Boeblingen, DE;
Hemantha K Wickramasinghe, Chappaqua, NY (US);
Olaf Wolter, Aidlingen, DE;
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
156653 ; 156643 ; 156646 ;
Abstract
A method is described for producing ultrafine silicon tips for the AFM/STM profilometry comprising: