The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 1993
Filed:
Aug. 02, 1989
Applicant:
Inventors:
Sangya Jain, Bridgewater, NJ (US);
Salvatore Emmi, Beaverton, OR (US);
Thomas S Phillips, W. Warwick, RI (US);
Assignee:
Hoechst Celanese Corporation, Somerville, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03C / ; G03F / ; G03F / ;
U.S. Cl.
CPC ...
430148 ; 430141 ; 430176 ; 430311 ; 430312 ; 430326 ; 430327 ; 430328 ;
Abstract
A water soluble built-on mask layer is provided on a photoresist composition disposed on a substrate. The photoresist comprises an o-quinone diazide and a novolak or paravinyl phenol resin. The built-on mask layer comprises a water soluble, photobleachable diazonium salt, a coupler for the diazonium salt and an acidic, polymeric, film forming resin such as polystyrene sulfonic acid.