The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 1993
Filed:
Sep. 25, 1991
Applicant:
Inventor:
Hironobu Nishi, Sagamihara, JP;
Assignee:
Tokyo Electron Sagami Limited, Kanagawa, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
156345 ; 118719 ; 118723 ;
Abstract
A vertical heat-treating apparatus to be used for a thermal diffusion step or film-forming step in the manufacture of a semiconductor device is proposed. This vertical heat-treating apparatus is characterized in that a work piece-waiting mechanism is incorporated in the apparatus for applying a pre-treatment to workpieces such as semiconductor wafers so as to prevent oxidation of the workpiece, or to remove the natural oxide film formed on the surface of the workpiece.