The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 1993
Filed:
Jan. 15, 1992
Applicant:
Inventors:
Alan F De Jong, Eindhoven, NL;
Dirk E Van Dijck, Aartselaar, BE;
Assignee:
U.S. Philips Corporation, New York, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250307 ; 250311 ;
Abstract
A method of autotuning an electron microscope by producing a series of images of the object to be examined, using a defined tilt of the electron beam in a different direction for each respective image. The images are thereby displaced relative to one another. Each image is then decomposed into a linear and a non-linear component thereof, and the linear image components are separated by Fourier filtering. The relative displacements of a number of the linear image components relative to each other are measured, and the measured displacement values are combined to derive autotuning parameters for the electron microscope.