The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 1993
Filed:
Feb. 18, 1992
Applicant:
Inventors:
Assignee:
Jeol Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250305 ; 250310 ;
Abstract
A scanning Auger spectrometer using a cylindrical mirror analyzer. This analyzer is set to a given value Eo. A deviation .DELTA.E of the energy actually measured by the analyzer from the set value Eo occurs. The relation of the deviation .DELTA.E to the coordinates of each analyzed point is measured. During the measurements, the set energy is shifted in response to the position hit by the electron beam according to information obtained from the measurements in such a way that the deviation does not take place.