The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 1993
Filed:
Feb. 28, 1992
Applicant:
Inventors:
Ken Nakao, Tokyo, JP;
Seiji Sakurai, Yokohama, JP;
Yoshihisa Miyahara, Yokohama, JP;
Yoshiyuki Motoyoshi, Yokohama, JP;
Assignee:
Tokyo Electron Sagami Limited, Kanagawa, JP;
Primary Examiner:
Int. Cl.
CPC ...
H05B / ;
U.S. Cl.
CPC ...
219390 ; 219388 ;
Abstract
A heating apparatus provided with a double layered heat-insulating material. This heat-insulating material includes an inner layer portion constituted by an alumina fiber/inorganic filler/inorganic binder and having a bulk density of 0.3 to 0.8 g/cm.sup.3, and an outer layer portion integrally laminated on the inner layer portion, and constituted by an alumina silica fiber/ inorganic binder and having a bulk density of 0.2 to 0.4 g/cm.sup.3 which is smaller than that of the inner layer portion.