The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 1993
Filed:
Sep. 10, 1991
Eric A Johnson, San Jose, CA (US);
Ying T Loh, Saratoga, CA (US);
Yoshiko H Strunk, Sunnyvale, CA (US);
Chung S Wang, Fremont, CA (US);
VLSI Technology, Inc., San Jose, CA (US);
Abstract
A method produces a transistor with an overlapping gate. A first gate region is placed on a substrate between two source/drain regions. The first gate region includes a polysilicon region on top of a dielectric region. Gate overlap regions are placed around the polysilicon region. The gate overlap regions extend out over the two source/drain regions. The gate overlap regions are formed of a metal-silicide layer, for example Titanium-silicide. A top portion of the metal-silicide layer is oxidized to form a silicon dioxide layer on top of the metal-silicide layer. At the time of oxidation, the metal-silicide layer is also annealed to which further helps to improves the Titanium-silicide stoichiometry.