The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 1993
Filed:
Sep. 10, 1991
Applicant:
Inventor:
Ryo Edo, Tokyo, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
250548 ; 356401 ;
Abstract
An alignment detecting method in which alignment detection for a mask and a wafer is effected by using an alignment beam projected from an alignment unit. According to this method, the attitude of the alignment unit is detected and an angle of projection of the alignment beam is adjusted o the basis of the attitude detection. Then, alignment detection for the mask and t he wafer is effected by using the angle-adjusted alignment beam.