The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 1993
Filed:
Aug. 30, 1991
Applicant:
Inventors:
Kazutoshi Nagai, Tokyo, JP;
Kanichi Itoh, Kanagawa, JP;
Assignee:
Ebara Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H / ;
U.S. Cl.
CPC ...
250251 ; 2503 / ;
Abstract
A fast atom beam source used e.g., for sputtering, includes an ion source that emits an ion beam and an electron gun that emits an electron beam at a speed substantially equal to the speed of the ions in the ion beam emitted from the ion source and in the same direction as that of the ion beam. The fast atom beam source may also include a speed control for regulating the speed of the electrons in the electron beam emitted from said electron gun to a level substantially equal to that of the speed of the ions in the ion beam, and a deflector which aligns the electron beam with the ion beam.