The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 1993
Filed:
May. 20, 1991
Applicant:
Inventor:
Kenneth A Snow, San Juan Bautista, CA (US);
Assignee:
Peak Systems, Inc., Fremont, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01K / ; G01B / ;
U.S. Cl.
CPC ...
374120 ; 374 55 ; 356357 ;
Abstract
An apparatus and method for determining the temperature of an object, such as a semiconductor wafer by measuring the physical change in a dimension of the semiconductor wafer is disclosed. This physical change is then correlated to the temperature using the coefficient of thermal expansion for the wafer.