The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 1993
Filed:
Sep. 27, 1991
Applicant:
Inventor:
Stanley J Kishner, Pomona, NY (US);
Assignee:
Hughes Danbury Optical Systems, Inc., Danbury, CT (US);
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356360 ; 356363 ;
Abstract
Optical metrology apparatus includes one or more first sample point interferometers (SPIs) (16) having a wide dynamic range for measuring a rigid body position of a surface of a structure, such as a segmented mirror (11). At least one second SPI (18), having a lower dynamic range, is employed for measuring a figure of the segmented mirror. Either the first or the second SPIs may also be employed to measure a lateral displacement between the mirror segments (11a, 11b). The use of multiple SPIs, having differing dynamic ranges, within a closed-loop mirror control system is also described.