The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 1993
Filed:
May. 02, 1990
Applicant:
Inventors:
Assignee:
Hitachi, Ltd., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ; G21K / ;
U.S. Cl.
CPC ...
2503581 ; 378206 ; 2503591 ; 2504581 ; 2504591 ; 2504611 ;
Abstract
A first beam of light having a wavelength ranging from a soft X-ray to a vacuum ultraviolet region is focused into a thin beam of light and irradiated upon a surface of a specimen, and physical information obtained as a result of such irradiation is detected to obtain information of the surface of the specimen. A second beam of light is focused into a thin beam of light and irradiated at the irradiation spot of the first beam of light upon the surface of the specimen, and the position of the irradiation spot of the second beam of light on the surface of the specimen is visually observed to located the position of the irradiation point of the first beam of light on the surface of the specimen.