The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 1993
Filed:
Nov. 27, 1991
Applicant:
Inventors:
Mitsuhiro Ogawa, Yao, JP;
Toshiki Ouno, Fukuoka, JP;
Taizou Ejima, Fukuoka, JP;
Satoru Kotou, Amagasaki, JP;
Assignees:
Taiyo Sanso Co., Ltd., Osaka, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; B24C / ;
U.S. Cl.
CPC ...
437225 ; 29 2501 ; 134-7 ; 51413 ; 51424 ; 51436 ;
Abstract
In an apparatus and a method for cleaning semiconductor wafers, an exhaust chamber having a sub-outlet slows down the flow of frozen micro-particles and thus prevents rebounding of the particles toward the wafer. Therefore, dust or the like is kept away from a cleaned semiconductor wafer so that the semiconductor wafers are cleaned more thoroughly.