The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 1993
Filed:
Nov. 01, 1991
Applicant:
Inventor:
Alfons Hausler, Obertshausen, DE;
Assignee:
Leybold Aktiengesellschaft, Hanau, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20419212 ; 20429811 ; 20429822 ; 20429823 ;
Abstract
Tubular target (1) has a magnet system (2) provided in the cavity (H) formed by the target (1) for the formation of a first plasma (6) for the coating of planar substrates (4) which are movable past the cathode (3), by means of a cathode sputtering process. A second plasma (9) is produced by a second magnet system (7) in the cavity (H) in an area between the cathode (3) and a plate (10) opposite the substrate (4).