The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 1993
Filed:
May. 24, 1991
Daniel B DeBra, Los Altos, CA (US);
William A Eckes, Castro Valley, CA (US);
Etec System, Inc., Castro Valley, CA (US);
Abstract
A laminar flow diffuser has a plurality of round, thin, stacked plates. A central bore penetrates all the plates with the exception of the bottom plate. The diffuser is secured to the vacuum chamber port. When gas enters the port, it enters the central bore and then flows radially outward through the interplate spaces to the outer circumference of the plates and subsequently into the periphery of the chamber. The diffuser thereby provides a controlled laminar flow which prevents turbulence in the chamber and hence, reduces the possibility of contamination to the workpiece in the chamber. The laminar flow diffuser is easily cleaned, both during its initial assembly and later after use, because it chiefly has flat surfaces which do not harbor dirt or gas.