The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 1993
Filed:
Dec. 29, 1989
Applicant:
Inventor:
John B Boos, Springfield, VA (US);
Assignee:
The United States of America as represented by the Secretary of the Navy, Washington, DC (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 40 ; 437 39 ; 437133 ; 437911 ; 437978 ; 748D / ; 748D / ; 748D / ;
Abstract
A new planar, fully ion-implanted indium phosphide junction FET (JFET) fabrication process, utilizing n.sup.+ source-drain implantation, Be and Be/P p.sup.+ gate implantation, and nitride-registered gate metallization.