The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 1993
Filed:
Nov. 12, 1991
Applicant:
Inventor:
Orest Engelbrecht, Ridgefield, CT (US);
Assignee:
SVG Lithography Systems, Inc., Wilton, CT (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B65G / ;
U.S. Cl.
CPC ...
414754 ; 414737 ; 414225 ; 414416 ; 414752 ;
Abstract
This invention relates to apparatus for prealigning the transport stage of an automated wafer handling lithographic system. The wafer is first rotated and its displacement in X, Y, and .THETA. from a desired orientation is determined. The wafer chuck of the transport stage is then displaced by a compensating amount.