The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 1993
Filed:
Oct. 04, 1991
Yukio Takabayashi, Kawasaki, JP;
Yukio Tokuda, Kawasaki, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An exposure apparatus for exposing a substrate with light from a light source has a stage for moving the substrate along a substantially horizontal plane, a base member for supporting the stage, and a frame member having at least three mounts for supporting the base member. A first actuator system having a plurality of first actuators provided in the mounts, respectively, moves the base member in a direction substantially parallel to the vertical direction. A second actuator system having at least one second actuator provided in at least one of the mounts moves the base member substantially along the horizontal plane. A control means is provided to control the first and second actuator systems in a such a way as to suppress vibration of the base member.