The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 1993
Filed:
Mar. 20, 1991
Applicant:
Inventors:
Takanobu Asano, Yokohama, JP;
Katsumi Ishii, Kanagawa, JP;
Assignee:
Tokyo Electron Sagami Limited, Kanagawa, JP;
Primary Examiner:
Int. Cl.
CPC ...
B65G / ;
U.S. Cl.
CPC ...
414757 ; 414417 ; 414433 ; 414D / ;
Abstract
A wafer counter device comprising a system for aligning the orientation flats of plural wafers in a cassette with one another and a system provided with optical sensors for detecting whether or not the wafers are present in the cassette and serving to count the number of the wafers in the cassette on the basis of the result detected by the optical sensors. The wafers aligning system includes aligning rollers contacted with the rims of the wafers to rotate the wafers, a system for lifting the aligning rollers in such a way that the rollers can be contacted with the rims of the wafers, and a motor for rotating the aligning rollers.