The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 1993
Filed:
Mar. 02, 1992
Hiroshi Matsuda, Kawagoe, JP;
Michitaka Suzuki, Akishima, JP;
JEOL Ltd., Tokyo, JP;
JEOL Technics Co. Ltd., Tokyo, JP;
Abstract
A scanning electron microscope capable of producing an accurate topographical image of a specimen surface irrespective of the elements of the specimen or if the dosage of electron beam varies. The instrument has two detectors arranged in such a way as to detect electron beams reflected from the specimen in two directions which are arranged symmetrically with respect to the normal line to the specimen surface. A subtractor circuit produces the difference between the output signals from the detectors. An adder circuit produces the sum of the output signals from the detectors. A corrective circuit divides the output signal from the subtractor circuit by the output signal from the adder circuit. The output signal from the corrective circuit is integrated by an integrator.