The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 19, 1993

Filed:

Mar. 04, 1992
Applicant:
Inventors:

Akira Okuda, Sakai, JP;

Yoshikazu Yoshida, Izumi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118718 ; 118715 ; 118723 ; 118724 ;
Abstract

An evaporation apparatus includes a vacuum chamber, a vacuum pump for producing a pressure-reduced atmosphere in the vacuum chamber, at least one vacuum evaporation source for evaporating an evaporation material provided in the vacuum chamber, a can, opposed to the vacuum evaporation source and rotating and ungrounded, for cooling a film on which the evaporation material is to be deposited, a supply roller for supplying the film to the can, a winding roller for winding the film on which the evaporation material has been deposited, a voltage-applying roller for assisting the winding and travel of the film and bringing into contact with a deposited material on the film, and a voltage applying device for applying a DC voltage to the film, on which the evaporation material has been deposited, through the voltage-applying roller to generate potential difference between the film and the can.


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