The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 1992
Filed:
Apr. 24, 1992
Applicant:
Inventors:
Guenther Doellein, Hanover, DE;
Guenter Weidenbach, Hanover, DE;
Hans Meyer, Wunstorf, DE;
Udo Bringmann, Halstenbek, DE;
Andreas Weber, Hamburg, DE;
Claus-Peter Klages, Hamburg, DE;
Assignee:
Solvay Deutschland GmbH, Hanover, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D / ;
U.S. Cl.
CPC ...
427569 ; 427249 ; 427250 ; 427255 ; 4272552 ; 427294 ; 427295 ; 427585 ; 427586 ; 427575 ; 427571 ;
Abstract
A process for depositing a layer containing boron and nitrogen on a substrate by decomposing one or more N-substituted borazoles in the presence of the substrate, in particular by a plasma CVD process.