The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 1992
Filed:
Sep. 27, 1991
Applicant:
Inventor:
Masaru Hidano, Yokohama, JP;
Assignee:
Tokyo Electron Sagami Limited, Kanagawa, JP;
Primary Examiner:
Int. Cl.
CPC ...
F27B / ;
U.S. Cl.
CPC ...
219390 ;
Abstract
A heat treating furnace has a reaction tube for accommodating an object to be treated, a heating device arranged to surround the reaction tube, a heat-insulating member arranged outside the heating device, a tubular member arranged outside the heat-insulating member, and a coolant circulating pipe arranged in a space between the tubular member and the heat-insulating member. According to the heat treating furnace of the present invention, a heat treatment can be performed while accurately performing temperature control.