The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 1992
Filed:
Oct. 30, 1991
Applicant:
Inventors:
Peter H Berasi, Hopewell Junction, NY (US);
Lannie R Bolde, New Paltz, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01V / ;
U.S. Cl.
CPC ...
250548 ; 356401 ;
Abstract
The present invention relates generally to a new apparatus and a method for alignment verification. More particularly, the invention encompasses an apparatus that allows the imaging on a structure from opposite sides while the imaging masks are on the opposite sides of the structure, and the masks and the structure are all aligned with each other. This apparatus also discloses means that can verify that the two imaging masks that are on the opposite sides of each other are aligned with each other during imaging processing.