The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 1992
Filed:
Apr. 17, 1991
Yuji Takagi, Yokohama, JP;
Seiji Hata, Fujisawa, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A method and an apparatus for inspecting a three-dimensional surface shape and pattern of an object under inspection by images of the surface of the object, said images being formed by reflected light rays from the object illuminated by lights. The surface of the object is illuminated by first and second lights provided on the inspected surface side of the object and at different heights from the object, images of the reflected light rays from the surface of the object illuminated by the first and second lights are acquired by an imaging unit, a first image of the surface of the object illuminated by the first light and a second image of the surface of the object illuminated by the second light, both acquired by the imaging unit, are input separately, brightness values at the same pixel points of the first and the second images are subjected to a division process to obtain a value, and by using this value as the brightness value of the pixel, a third image is formed which is used for quality evaluation.