The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 1992
Filed:
Nov. 13, 1990
Applicant:
Inventor:
Bruce Murdock, Beaverton, OR (US);
Assignee:
Tektronix, Inc., Wilsonville, OR (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ; G01D / ; G01H / ; G01R / ;
U.S. Cl.
CPC ...
32420713 ; 73651 ; 32420722 ; 324248 ; 324262 ; 505846 ;
Abstract
A micromechanical sensor comprises a support, a micromechanical element that is movable relative to the support under the application of a stimulus, and a transducer. The transducer comprises a first component carried by the micromechanical element and movable therewith, and a second component stationary relative to the support. One of the first and second transducer components is a member for establishing a magnetic field and the other of the first and second transducer components is a SQUID positioned in the magnetic field for detecting variation in the magnetic field due to relative movement of the micromechanical element and the support.