The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 17, 1992

Filed:

Jul. 10, 1985
Applicant:
Inventors:

Eckhard Wolfgang, Munich, DE;

Klaus Zibert, Holzkirchen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R / ;
U.S. Cl.
CPC ...
3241 / ; 324 731 ; 364579 ;
Abstract

Method and apparatus for analyzing errors or failures in integrated circuits wherein the integrated circuit is displayed on the picture screen of a work station (AS) and the circuit is excited with a test signal such that at least one measuring location is selected on a malfunction path and an actual signal tappable at this measuring location is compared to a rated signal and wherein the fault location is identified from the comparison results at the measuring locations. The object is to execute a method using an electron beam testing apparatus (EMG) such that the simplest possible measured data transfer occurs. For this purpose the selection of the measuring location on the malfunctioning path proceeds such that a portion (23) of the layout of the integrated circuit corresponding to the measuring location is displayed on the picture screen of the work station and the measuring location is marked by a cursor (24) and position signals depending on the positon of the cursor (24) are supplied to the electron beam measuring apparatus for aligning the electron beam (2) to the measuring location and such that the electron beam testing apparatus is utilized for the identification of the actual signal.


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