The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 1992
Filed:
Aug. 02, 1991
Applicant:
Inventors:
Assignee:
Sharp Kabushiki Kaisha, Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H04L / ;
U.S. Cl.
CPC ...
437 18 ; 437 22 ; 437930 ;
Abstract
There is provided a method for producing a semiconductor device having a semiconductor layer in which carbon is implanted as an impurity. The method includes the steps of: implanting fluorocarbon ions in a semiconductor layer; and annealing the semiconductor layer to activate the implanted ions.