The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 22, 1992

Filed:

May. 15, 1991
Applicant:
Inventor:

Minoru Watanuki, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B / ;
U.S. Cl.
CPC ...
359360 ; 359845 ; 126446 ; 126448 ;
Abstract

A reflective mirror having a cooling unit attached thereto is provided with a layer of material deposited on the surface of a glass plate. This material has such properties that most of ultraviolet rays in a light beam emitted from a light source are reflected from the reflective surface of the reflective mirror (cold mirror) but infrared rays permit to permeate through the reflective mirror or are absorbed in the substrate of the reflective mirror. The cooling unit is disposed on the opposite side to the reflective surface of the reflective mirror to absorptively remove infrared rays emitted from the light source. The reflective mirror is preferably employable for an exposing equipment in which the reflective mirror of the present invention and a plurality of conventional reflective mirrors each made of an ordinary metallic material are arranged as essential components with a lower working temperature.


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