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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 5145649 B1

PDFFull Text
Date of Patent:
Sep. 08, 1992

Filed:

Oct. 02, 1990

Apparatus for cleaning an optical element for use with a radiation beam

Applicant:
Inventors:

Takashi Iizuka, Atsugi, JP;

Yasuaki Fukuda, Hadano, JP;

Masami Hayashida, Atsugi, JP;

Masahito Niibe, Atsugi, JP;

Assignee:

Canon Kabushiki Kaisha, Tokyo, JP;

Attorney:

Fitzpatrick, Cella, Harper & Scinto

Primary Examiner:

Robert J Warden

Assistant Examiner:

T A Trembley

Int. Cl.
CPC ...
B08B / ;
U.S. Cl.
CPC ...
422129 ; 4221863 ; 422186 ; 134-1 ; 359509 ;
Abstract

A method and apparatus for removing unclear matter on an optical element used with a radiation beam is disclosed. A filter is used to introduce light of a desired wavelength into a chamber in which the optical element is accommodated; a gas supplying device is used to supply a reactive gas which is reactable with the unclear matter on the surface of the optical element; and a vacuum-evacuating device is used to vacuum-evacuate the inside of the chamber.

Find Patent Forward Citations

Iizuka, Takashi. (1992). Apparatus for cleaning an optical element for use with a radiation beam (U.S. Patent No. 5145649). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5145649

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