The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 1992
Filed:
Dec. 17, 1990
Applicant:
Inventors:
Hisaya Murakoshi, Hachioji, JP;
Mikio Ichihashi, Kodaira, JP;
Shigeto Isakozawa, Katsuta, JP;
Yuji Sato, Katsuta, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
250311 ; 250306 ;
Abstract
A field emission electron microscope in which a controller is provided to make an electron beam current fixed due to variations in an accelerating voltage or an extracting voltage to thereby make fixed the brightness of an electron beam with which a specimen is illuminated.